Layer-by-layer photonic crystal fabricated by low-temperature atomic layer deposition
| Title | Layer-by-layer photonic crystal fabricated by low-temperature atomic layer deposition |
| Publication Type | Journal Article |
| Year of Publication | 2007 |
| Authors | Lee JH, Leung W, Ahn J, Lee T, Park IS, Constant K, Ho KM |
| Journal Title | Applied Physics Letters |
| Volume | 90 |
| Pages | 151101 |
| Date Published | Apr |
| Type of Article | Article |
| ISBN Number | 0003-6951 |
| Accession Number | ISI:000245690700001 |
| Keywords | BANDGAP CRYSTALS, gaps, INFRARED WAVELENGTHS, NITRIDE INVERSE OPALS, SOFT LITHOGRAPHY, STRUCTURAL FLUCTUATIONS |
| Abstract | Layer-by-layer three-dimensional photonic crystals are fabricated by low-temperature atomic layer deposition of titanium dioxide on a polymer template created by soft lithography. With a highly conformal layer of titanium dioxide, a significantly enhanced photonic band gap effect appears at 3.1 mu m in transmittance and reflectance. From optical investigations of systematically shifted structures, the robust nature of the photonic band gap with respect to structural fluctuations is confirmed experimentally. With angle-resolved Fourier-transform spectroscopy, the authors also demonstrate that the fabricated photonic crystal can be a diffraction-free device as the photonic band gap exists over the diffracting regime. (c) 2007 American Institute of Physics. |
| DOI | 10.1063/1.2720752 |
| Alternate Journal | Appl. Phys. Lett. |
