Ultrafast laser direct-write actuable microstructures
| Title | Ultrafast laser direct-write actuable microstructures |
| Publication Type | Journal Article |
| Year of Publication | 2008 |
| Authors | Tapalian HC, Langseth J, Chen Y, Anderegg JW, Shinar J |
| Journal Title | Applied Physics Letters |
| Volume | 93 |
| Pages | 243304 |
| Date Published | 12/15 |
| ISBN Number | 0003-6951 |
| Accession Number | ISI:000261896400077 |
| Keywords | degradation, ELECTROLUMINESCENCE, high-speed optical techniques, laser materials processing, micromechanical devices, optical modulation, pulses |
| Abstract | Actuable microelectromechanical systems (MEMS), fabricated by direct "writing" of deformable membranes on indium tin oxide/copper phthalocyanine (CuPc)/Al microstructures using 130 fs laser pulses, are described. The pulses locally ablate the CuPc without requiring micromachined release holes, demonstrating a novel material release mechanism. The direct-write procedure therefore requires fewer processing steps than traditional MEMS approaches. Using it, we fabricated optical modulators with phase modulation depths >pi, intensity modulation amplitudes >50%, and bandwidths >100 kHz, at 5-10 V drive voltage. Fabrication of numerous microstructures and nanostructures can be envisioned, including photonic crystals and optical phased-array gratings. |
| URL | <Go to ISI>://000261896400077 |
| DOI | 10.1063/1.2972116 |
